Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 29, 2008
Patent Application Number
11033380
Date Filed
January 12, 2005
Patent Primary Examiner
Patent abstract
The invention is aimed to prevent that fall of characteristic of a solar battery and producing yield caused by particles of powder condition generating from working part at laser beam process in the method producing the solar battery by laser beam process. The constitution of the invention is characterized by comprising: a first step forming the lower electrode and the semiconductor layer on the insulating substrate by laminating; a second step forming a protective film on surface of the semiconductor; a third step forming an opening portion at the semiconductor layer, or the semiconductor layer and the lower electrode by laser beam process after the second step; and a fourth step removing the protective film.
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