Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Thomas M. McCleskey0
Yuan Lin0
Anthony K. Burrell0
Quanxi Jia0
Date of Patent
April 29, 2008
0Patent Application Number
106164790
Date Filed
July 8, 2003
0Patent Primary Examiner
Patent abstract
A polymer assisted deposition process for deposition of metal oxide films is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.
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