US Patent 7366219 Line narrowing module
Patent 7366219 was granted and assigned to Cymer on April, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 30, 2004
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Date of Patent
April 29, 2008
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Patent Application Number
11000684
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Patent Citations Received
Patent Inventor Names
J. Martin Algots
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Brian Strate
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German E. Rylov
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Vladimir A. Kulgeyko
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Walter D. Gillespie
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William N. Partlo
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Richard L. Sandstrom
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Robert A. Bergstedt
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Timothy S. Dyer
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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