Patent attributes
A form measuring instrument comprising: a roughness sensor placed on the table, and for outputting measurement data that includes information on the cross-sectional shape; a relative movement mechanism for relatively moving the table and the roughness sensor such that the position of the roughness sensor on the workpiece is relatively moved along the surface to be evaluated, and for outputting the amount of relative movement at a movement resolution Δθ as indexed-movement-amount information; a time sampler for sampling the measurement data output from the roughness sensor, at a constant time interval ts; and a data processing mechanism for converting the measurement data sampled at the constant time interval ts by the time sampler to measurement data having a fixed interval according to the indexed-movement-amount information output from the relative movement mechanism.
