Patent attributes
A contact-type displacement measuring apparatus includes a first movable body that reciprocates in a first linear direction; a driving unit that drives the first movable body; a second movable body that reciprocates in a second linear direction parallel to the first linear direction, in association with movement of the first movable body; a probe detachably arranged at a tip of the second movable body; a measuring force detecting unit that detects, at a rear end of the second movable body, a measuring force to an object when the probe is in contact with the object; a position detecting unit that detects, between the probe and the measuring force detecting unit, an amount of movement of the second movable body; and a control device that controls the amount of movement such that the measuring force is kept constant corresponding to an output of the measuring force detecting unit.
