Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wen-Cheng Hsu0
Yu-Ying Chan0
Ching-Lung Wang0
Tseng-Kuei Tseng0
Date of Patent
May 6, 2008
0Patent Application Number
111111410
Date Filed
April 20, 2005
0Patent Primary Examiner
Patent abstract
An apparatus (3) for removing developing solution from a substrate (30) includes a working table (36) for placing the substrate, a supporting frame (33) positioned on the working table, a gas dispensing nozzle (31) mounted on the supporting frame, and a water dispensing nozzle (32) mounted on the supporting frame. The apparatus can remove the residual developing solution from the substrate and needs not to lift the substrate. The substrate is safely processed and the working time is improved.
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