US Patent 7368020 Reduced particle contamination manufacturing and packaging for reticles

Patent 7368020 was granted and assigned to Intel on May, 2008 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Intel

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

73680200

Patent Inventor Names

Giang T. Dao0

Ronald J. Kuse0

Date of Patent

May 6, 2008

Patent Application Number

108183110

Date Filed

April 5, 2004

Patent Primary Examiner

‌

Alexander Markoff

Patent abstract

A method of transporting a reticle is disclosed. The reticle is placed in a reticle carrier that has an ionizer. Moreover, the reticle may be attached with a pellicle. The pellicle consists of a pellicle frame and a pellicle film stretched over the pellicle frame. The pellicle frame has included within an absorbent material.

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