US Patent 7369332 Closing module for an optical arrangement

Patent 7369332 was granted and assigned to Carl Zeiss SMT on May, 2008 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Carl Zeiss SMT

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

73693320

Patent Inventor Names

Thomas Schletterer0

Date of Patent

May 6, 2008

Patent Application Number

111048530

Date Filed

April 13, 2005

Patent Primary Examiner

‌

Timothy Thompson

Patent abstract

Closing module for an optical arrangement, in particular for an objective for microlithography, comprising an optically active closing element (3) having a first axis (3.1) and a holding device (2) that fixes the closing element (3) at least in the direction of the first axis (3.1), the holding device (2) being configured for radial clamping of the closing element (3).

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