US Patent 7371287 Substrate handling system
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Patent abstract
A substrate handling system and method in which an air chuck produces a film of air between the substrate and the air chuck, a magnetic chuck attracts the substrate to the air chuck, and an actuator subsystem moves the magnetic chuck closer to and away from the air chuck to alternately pick up a substrate and release the substrate.
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US Patent 07371287 Substrate handling system US Patent 7371287 Substrate handling system
Infobox
Patent Number
0737128700
Patent Number
737128700
Edits on 27 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
073712870
Date of Patent
May 13, 2008
0Patent Application Number
108378420
Date Filed
May 3, 2004
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
073712870
Date of Patent
May 13, 2008
0Patent Application Number
108378420
Date Filed
May 3, 2004
0Official Website
Patent Primary Examiner
Edits on 17 Jun, 2022
Golden AI
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Edits on 26 Nov, 2021
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US Patent 07371287 Substrate handling system
Infobox
Is a
Patent jurisdiction
Patent number
07371287
Date of patent
May 13, 2008
Patent application number
10837842
Date Filed
May 3, 2004
Patent primary examiner
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