Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masayoshi Esashi0
Naoki Kikuchi0
Date of Patent
May 13, 2008
Patent Application Number
11616328
Date Filed
December 27, 2006
Patent Primary Examiner
Patent abstract
There is provided a micromirror which includes a holding unit, a mirror that is held by the holding unit to be pivotable about a rotation axis of the mirror, a first fixed electrode group including a plurality of electrodes fixed to the holding unit, a second fixed electrode group including a plurality of electrodes fixed to the holding unit, a first movable electrode group including a plurality of electrodes fixed to the mirror and located adjacently to the first fixed electrode group, and a second movable electrode group including a plurality of electrodes fixed to the mirror and located adjacently to the second fixed electrode group.
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