US Patent 7373025 Waveguide-type optical device

In the present invention, for example with regards to a Mach-Zehnder type LN modulator which uses a Z-cut LN substrate, by providing a step by forming an etching part on the surface of the LN substrate, and forming an optical waveguide so as to position a pair of branching waveguides of a Mach-Zehnder interferometer in the step portion, a height difference is produced between the branching waveguides, in the perpendicular direction to the substrate surface. As a result, lines of electric force directed from a signal electrode provided above one branching waveguide towards a ground electrode provided above an other branching waveguide are hardly dispersed, and a desired electro-optic effect can be obtained at a lower drive voltage.