Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Clarence Chui0
Date of Patent
May 13, 2008
0Patent Application Number
111742200
Date Filed
July 1, 2005
0Patent Primary Examiner
Patent abstract
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated by an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate reflected light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.
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