Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Naoteru Matsubara0
Date of Patent
May 27, 2008
0Patent Application Number
115112610
Date Filed
August 29, 2006
0Patent Primary Examiner
Patent abstract
A sensor hard to break and capable of improving sensitivity is obtained. This sensor comprises an electrode plate and a diaphragm, opposed to the electrode plate, including a first elastic film arranged on a central portion and a second elastic film, arranged at least on a peripheral portion of the first elastic film, made of a material having a lower elastic modulus than the first elastic film.
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