Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Osamu Takaoka0
Shigeru Wakiyama0
Masatoshi Yasutake0
Date of Patent
May 27, 2008
Patent Application Number
11066063
Date Filed
February 25, 2005
Patent Primary Examiner
Patent abstract
A processing probe for repairing a defective portion in a sample has a cantilever and a probe separate and independent from the cantilever and integrally connected to an end portion of the cantilever for scratch-processing a defective portion of a sample. The cantilever and the probe are conductive for preventing the generation of electrostatic charges by friction of the probe against the sample during scratch-processing of the defective portion of the sample.
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