Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Carl E. Hess0
Joseph M. Blecher0
Date of Patent
May 27, 2008
0Patent Application Number
109673750
Date Filed
October 18, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The above and other needs are met by an inspection system having a sensor array that is connected to a high speed network connection, and is adapted to provide image data in regard to images of a substrate. A process node is also connected to the high speed network connection, and is adapted to received the image data over the high speed network connection and to analyze the image data to detect anomalies in the images. In this manner, commercially available hardware can be used to construct the inspection system, which thus overcomes many of the problems with expensive, unreliable, and inflexible prior art inspection systems.
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