US Patent 7381663 Method of fabricating a surface shape recognition sensor
Patent 7381663 was granted and assigned to Nippon Telegraph and Telephone on June, 2008 by the United States Patent and Trademark Office.
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A structure (113b) which includes an overhang and a support portion supporting substantially the center of the overhang, and in which the area of the support portion is smaller than the area of the overhang in the two-dimensional direction of an upper electrode (1110b) is formed on the upper electrode (110a) in a region above each lower electrode 105a in one-to-one correspondence with the lower electrode (105a). An object of surface shape sensing, e.g., the tip of a finger (1602) touches the surface of the overhang of the structure (113b), and the support portion of the structure (113b) whose overhang is in contact with the object of sensing pushes down a portion of the upper electrode (110a) toward the lower electrode (105a), thereby deforming the upper electrode (110a).
US Patent 07381663 Method of fabricating a surface shape recognition sensor US Patent 7381663 Method of fabricating a surface shape recognition sensor
US Patent 07381663 Method of fabricating a surface shape recognition sensor
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