Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
H. Craig Silvis0
Robert E. Hefner, Jr.0
Q. Jason Niu0
James P. Godschalx0
Date of Patent
June 3, 2008
Patent Application Number
10549382
Date Filed
April 1, 2004
Patent Primary Examiner
Patent abstract
A monomer suitable for use in forming low dielectric constant films in semiconductor devices comprising i) two dienophile groups (A-functional groups) attached to a single aromatic ring and ii) a second ring structure comprising two conjugated carbon-to-carbon double bonds and a leaving group L (B-functional group), characterized in that said single aromatic ring is directly covalently attached to one of the double bonded carbons of the B functional group or to a fused aromatic ring containing two such double bonded carbons of the B-functional group, and one A-functional group of one monomer is capable of reaction under cycloaddition reaction conditions with the B-functional group of a second monomer to thereby form a polymer.
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