US Patent 7381977 Ion beam profiler
Patent 7381977 was granted and assigned to Axcelis Technologies on June, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 27, 2005
0
Date of Patent
June 3, 2008
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Patent Application Number
11235754
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Patent Inventor Names
John D. Pollock
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John W. Vanderpot
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Donald W. Berrian
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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