US Patent 7383141 Faraday system integrity determination

Patent 7383141 was granted and assigned to Varian Semiconductor Equipment Associates on June, 2008 by the United States Patent and Trademark Office.

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Patent Inventor Names

Joseph P. Dzengeleski0

Vinay Aggarwal0

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Patent abstract

A system, method and program product for determining the integrity of a faraday system are disclosed. The invention uses a computer infrastructure to control an automatic determination of a faraday system integrity, when the faraday system is not in operation. The determination is based on the variations on an impedance of the faraday system. An impedance of a faraday system is determined based on the discharge characteristics of a capacitor that discharges through the faraday system.

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=073831410

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