Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yasuo Ohama0
Katsuhiko Kemmochi0
Robert Mosier0
Date of Patent
June 10, 2008
0Patent Application Number
112231580
Date Filed
September 8, 2005
0Patent Primary Examiner
Patent abstract
A silica glass crucible includes a stable, bubble-free inner layer and an opaque outer layer, both layers demonstrating reduced bubble growth during a Czochralski process. When used in the CZ process, little volume change is observed in the crucible wall, and the crucible has little influence on melt level. The present crucible is especially suited for slow silicon ingot pulling with reduced crystalline defects. The fusion process of the present invention controls the dynamic gas balance at the fusion front where formed grain is melted to dense fused silica.
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