Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 10, 2008
Patent Application Number
11137674
Date Filed
May 24, 2005
Patent Primary Examiner
Patent abstract
A method for detecting particle agglomeration in CMP slurries. In accordance with an implementation of the invention, a CMP slurry is tested for abrasive particle agglomeration by applying an ultra high shearing force to the slurry and analyzing its rheological behavior. Through the comparison of slurry rheological behavior, implementations of the invention make it possible to detect particle agglomeration in a slurry and to distinguish between fresh and aged slurries.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
