Patent attributes
A micro-electromechanical (MEM) device includes a proof mass resiliently mounted to a substrate. The proof mass has first and second combs formed on opposite sides thereof and is electrically coupled to ground. A fixed drive comb is interleaved with the first comb of the proof mass. A fixed pick-off comb is interleaved with a portion of the second comb of the proof mass. A fixed bias comb is interleaved with the second proof mass comb. A substantially direct current (DC) bias is applied to the fixed bias comb. A substantially constant voltage is also exerted on a sense plate beneath the proof mass. The sense plate and bias comb are coupled to a charge amp through capacitors such that transient currents induced by motion of the proof mass will cause current to flow to a charge amp.
