Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 10, 2008
Patent Application Number
10525763
Date Filed
August 26, 2003
Patent Primary Examiner
Patent abstract
A method for manufacturing optical components in a three-dimensional photonic crystal lattice. A first resist (9) is coated on a substrate (10) and exposed to an e-beam (11), to produce an imaged area (12). Another resist coating is applied to thicken the resist (13) and an interference exposure (15) is used to image the result. This is developed to form periodic voids (16), which may be filled with a materials having a high refractive index to form a pattern (18 and 12) when the resist (13) is removed.
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