Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 10, 2008
Patent Application Number
10688326
Date Filed
October 17, 2003
Patent Primary Examiner
Patent abstract
A concurrent low resolution/high resolution parallel scanning system and method are provided as an improvement in the scanning process of an inspection system for planar objects, such as large flat plates employed in panel displays, whereby lower resolution defect detection efficiently overlaps and parallels higher resolution defect review and classification stages in which defects are automatically defined and resolved. Although the invention is a valid solution for the more general problem of optically inspecting the surface of a flat article for defects, the invention is particularly useful for detecting pattern defects on large glass plates deposited with integrated-circuits for forming LCD flat panel displays.
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