Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Edward Davis0
Larry DiRuscio0
Matthew Last0
Date of Patent
June 10, 2008
0Patent Application Number
117283620
Date Filed
March 26, 2007
0Patent Citations Received
Patent Primary Examiner
0
Patent abstract
A MEMS mirror array in which the MEMS mirrors are driven in two axes by vertical comb drive actuators. Tortional elements with conductive comb fingers are utilized to provide the two axis actuation. A MEMS mirror control system supplies electrical voltage potentials between inside pivoting support frame conductive comb fingers and mirror frame conductive comb fingers and supplies electrical voltage potentials between MEMS mirror array support frame conductive comb fingers and outside pivoting support frame conductive comb fingers. In preferred embodiments two MEMS mirror arrays are utilized to provide beam direction in a cross connect switch.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
