Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 17, 2008
Patent Application Number
11029510
Date Filed
January 6, 2005
Patent Primary Examiner
Patent abstract
Provided are a method and system for projecting an illumination beam to an image plane. The method includes producing a sample of the illumination beam and projecting the sample to a secondary image plane. Next, an illumination uniformity profile associated with the projected sample is measured while the received illumination beam is being projected to the image plane.
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