Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 24, 2008
0Patent Application Number
108171330
Date Filed
April 1, 2004
0Patent Primary Examiner
Patent abstract
An apparatus for processing a substrate is provided which includes a first manifold module to generate a fluid meniscus on a substrate surface. The apparatus also includes a second manifold module to connect with the first manifold module and also to move the first manifold module into close proximity to the substrate surface to generate the fluid meniscus.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
