Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 24, 2008
Patent Application Number
10793427
Date Filed
March 3, 2004
Patent Primary Examiner
Patent abstract
New polymers are provided that have non-carbon tetravalent species (Si, Ti, Ge, Zr, Sn) and photoimageable compositions that contain such polymers. Preferred polymers are organic, e.g. one or more polymer repeat units comprise carbon atom(s). Particularly preferred are polymers that comprise SiO2 or TiO2 repeat units and which can be highly useful as a resin component of resists imaged at short wavelengths such as sub-300 nm and sub-200 nm.
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