Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 24, 2008
Patent Application Number
11257304
Date Filed
October 24, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
One embodiment described relates to a multiple electron beam apparatus. Multiple columns are arranged in a row configured to generate multiple electron beams. A mechanism is included for translating a substrate so as to be impinged upon by the multiple electron beams. A direction of the substrate translation and a direction of the row of columns are at a skew angle.
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