Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 1, 2008
Patent Application Number
11296052
Date Filed
December 6, 2005
Patent Primary Examiner
Patent abstract
A method of manufacturing an external force detection sensor in which a sensor element is formed by through-hole dry etching of an element substrate, and an electrically conductive material is used as an etching stop layer during the dry etching.
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