Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kwang Chul Joo0
Date of Patent
July 1, 2008
0Patent Application Number
112949900
Date Filed
December 6, 2005
0Patent Primary Examiner
Patent abstract
A method of manufacturing a dielectric film of a flash memory device, including the steps of providing a semiconductor substrate having floating gates formed therein, performing an oxidization process in a decompression state to form a first oxide film of a thin film on the semiconductor substrate including the floating gates, and sequentially forming a nitride film and a second oxide film on the first oxide film to form a dielectric film having the first oxide film, the nitride film and the second oxide film.
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