US Patent 7394535 Optical metrology using a photonic nanojet
Patent 7394535 was granted and assigned to Tokyo Electron on July, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 20, 2007
Date of Patent
July 1, 2008
Patent Application Number
11726083
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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