Patent attributes
The present invention provides an inspection method and an inspection apparatus which can remove influence of rear surface reflection image and inspect characteristic of a front surface shape with good accuracy by an inexpensive apparatus construction. First of all, as a stripe pattern suitable for a transparent plate-shaped object 3 (object to be inspected), a stripe pattern 1 having a bright-dark pattern configured so that its reflection image produced by the front surface of the transparent plate-shaped object and its reflection image produced by a rear surface of the transparent plate-shaped object are separated in an image signal obtained by image-capturing, is determined. Thereafter, using the decided stripe pattern 1, the front surface shape of the transparent plate-shaped object 3 is evaluated by an image analysis using only a reflection image of the stripe pattern 1 produced by the transparent plate-shaped object 3.
