Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 8, 2008
Patent Application Number
11384297
Date Filed
March 21, 2006
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for manufacturing a single crystal includes the steps of: flowing a raw material gas toward a seed crystal in a reactive chamber so that the single crystal grows from the seed crystal; controlling the raw material gas by a gas flow control member having a cylindrical shape; passing the raw material gas through a clearance between the seed crystal and an inner wall of the gas flow control member; and flowing a part of the raw material gas to bypass the seed crystal. The method provides the single crystal having good quality.
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