Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
In-Joon Yeo0
Date of Patent
July 8, 2008
0Patent Application Number
109720260
Date Filed
October 21, 2004
0Patent Primary Examiner
Patent abstract
A substrate cleaning device comprises a chamber for cleaning a substrate; a substrate support installed in the chamber providing a surface for supporting the substrate during cleaning thereof; at least one cleaning solution supply outlet for spraying a cleaning solution onto a surface of the substrate; a vibration force generator for supplying a vibratory action; a vibration force generating shaft which receives said vibratory action from the vibration force generator so that said vibration force generating shaft vibrates for agitating the cleaning solution on the substrate; and a vibration force distributor for preventing a vibration force from being concentrated on a portion of the substrate below the vibration force generating shaft.
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