Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yosuke Osawa0
Jun Iwabuchi0
Date of Patent
July 8, 2008
0Patent Application Number
117242210
Date Filed
March 15, 2007
0Patent Primary Examiner
Patent abstract
The present invention provides a sulfonium salt which can serve as a photo-acid-generator, the sulfonium salt not raising the problem of poor compatibility to a photoresist polymer having an acid-dissociable group. The sulfonium salt is represented by formula (1):
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
