Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ying-Jyh Liao0
Date of Patent
July 8, 2008
Patent Application Number
11342977
Date Filed
January 30, 2006
Patent Primary Examiner
Patent abstract
An exposure apparatus includes a loading device, a first energy-producing device, and a second energy-producing device. The loading device comprises a plurality of supporting elements, supporting a panel. The first and second energy producing devices are disposed above and below the loading device, respectively.
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