US Patent 7400008 Semiconductor device and manufacturing process therefor

An objective of this invention is to provide a semiconductor device comprising a less bias-dependent capacitative element with a large capacity per a unit area, having a configuration which can be manufactured using an existing structure in a semiconductor device. There is provided a semiconductor device 100, comprising a semiconductor substrate; a lower interconnection 101 on the semiconductor substrate, in whose upper surface a concave is formed; dielectrics 102a, 102b, 102c, 102d covering the inner surface of the concave; and a upper interconnection 104 on the dielectrics 102a, 102b, 102c, 102d.