US Patent 7401399 Method of manufacturing a substrate heating device
Patent 7401399 was granted and assigned to NGK Insulators on July, 2008 by the United States Patent and Trademark Office.
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Patent abstract
A manufacturing method for a substrate heating device comprises forming a base plate having a substrate heating surface in which a resistance heating element is buried, forming a tubular member, joining the tubular member to the base plate, measuring temperature distribution in the substrate heating surface by supplying power to the resistance heating element, and grinding the tubular member according to a grinding condition based on a measurement result of the temperature distribution.
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US Patent 07401399 Method of manufacturing a substrate heating device US Patent 7401399 Method of manufacturing a substrate heating device
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Patent Number
0740139900
Patent Number
740139900
Edits on 28 Mar, 2023
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
074013990
Date of Patent
July 22, 2008
0Patent Application Number
110595760
Date Filed
February 16, 2005
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
074013990
Date of Patent
July 22, 2008
0Patent Application Number
110595760
Date Filed
February 16, 2005
0Official Website
Patent Primary Examiner
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US Patent 07401399 Method of manufacturing a substrate heating device
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07401399
Date of patent
July 22, 2008
Patent application number
11059576
Date Filed
February 16, 2005
Patent primary examiner
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