Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
July 22, 2008
Patent Application Number
11353358
Date Filed
February 14, 2006
Patent Primary Examiner
Patent abstract
A capacitive sensor and a method of making it with a substrate having a diaphragm forming a first plate of a capacitor; a second fixed plate of the capacitor spaced from the diaphragm and defining a predetermined dielectric gap; a plurality of conductor elements interconnecting the substrate and fixed plate; and an edge lock supporting the fixed plate and the substrate relative to each other for maintaining the dimension of the defined gap independent of the conductor elements.
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