Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 22, 2008
0Patent Application Number
109035260
Date Filed
July 30, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
This invention concerns liquid perfluoro-n-alkanes for use in applications demanding high transparency at UV wavelengths ranging from about 150 to 165 nm, especially 157 nm. Uses include optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and most especially immersion photolithography at 157 nm exposure wavelength.
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