US Patent 7402875 Lateral undercut of metal gate in SOI device

Patent 7402875 was granted and assigned to Intel on July, 2008 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Intel

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

74028750

Patent Inventor Names

Suman Datta0

Justin K. Brask0

Mark L. Doczy0

Robert S. Chau0

Brian S. Doyle0

Gilbert Dewey0

Jack Kavalieros0

Date of Patent

July 22, 2008

Patent Application Number

112070510

Date Filed

August 17, 2005

Patent Primary Examiner

‌

Edward Wojciechowicz

Patent abstract

Embodiments of the invention provide a device with a metal gate, a high-k gate dielectric layer, source/drain extensions a distance beneath the metal gate, and lateral undercuts in the sides of the metal gate.

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