Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuhei Sumiyoshi0
Date of Patent
July 22, 2008
0Patent Application Number
112824180
Date Filed
November 17, 2005
0Patent Primary Examiner
Patent abstract
A projection optical system used for an exposure apparatus to projecting a reduced size of an image of an object onto an image plane includes plural refractive elements that dispense with a reflective element having a substantial optical power, wherein the projection optical system forms an intermediate image.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
