US Patent 7403386 Electrostatic chuck

Patent 7403386 was granted and assigned to NGK Insulators on July, 2008 by the United States Patent and Trademark Office.

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Patent Inventor Names

Hideyoshi Tsuruta0

Keiji Kawasaki0

Yasufumi Aihara0

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Patent abstract

An electrostatic chuck includes; a base made of ceramics, in which an electrode generating electrostatic attractive force is embedded; a cooling member which contains metal; a bonding material which bonds the base and the cooling member to each other; a gas providing passage which penetrates the base, the bonding material, and the cooling member; and an engagement member and a bolt member, which are fixing members mechanically fixing the base and the cooling member to each other.

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Official Website

https://pdfpiw.uspto.gov/.piw?Docid=074033860

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