US Patent 7404332 Micromechanical component and method

Patent 7404332 was granted and assigned to Bosch (company) on July, 2008 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Bosch

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7404332

Date of Patent

July 29, 2008

Patent Application Number

10529420

Date Filed

March 6, 2003

Patent Primary Examiner

‌

Andre J Allen

Patent abstract

A micromechanical component and a method for producing a micromechanical component are proposed, a hollow space and a region of porous silicon being provided, the region of porous silicon being provided for lowering the pressure prevailing in the hollow space.

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