Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 29, 2008
Patent Application Number
11616075
Date Filed
December 26, 2006
Patent Primary Examiner
Patent abstract
The substrate processing apparatus has an enclosure structure enclosing a substrate support member to define a processing space. The enclosure structure has an opening closed by a shutter. A processing fluid supply unit, which supplies processing fluid, such as chemical liquid, is accommodated in a housing. The processing fluid supply unit accommodated in the housing is advanced into the processing space through the opening of the enclosure structure to feed the processing fluid onto the substrate supported by the substrate support member.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
