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US Patent 7404698 Turbomolecular pump with static charge control

Patent 7404698 was granted and assigned to Edwards Vacuum on July, 2008 by the United States Patent and Trademark Office.

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Current Assignee
Edwards Vacuum
Edwards Vacuum
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7404698
Date of Patent
July 29, 2008
Patent Application Number
11204615
Date Filed
August 16, 2005
Patent Primary Examiner
‌
Richard Edgar
Patent abstract

The present invention relates to turbomolecular vacuum pumps and an arrangement for reducing or eliminating an accumulated static charge in the rotor caused by an interaction of the rotor with either electrically charged or neutral particles in the pumped media. Electrical charge exchange between the rotor and the electrically grounded stator is effected through a wire or other means of electrical contact, or through charge emission devices such as a field emission tip. In either case, electrostatic charges in the rotor are reduced or eliminated.

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