US Patent 7405521 Multiple frequency plasma processor method and apparatus
Patent 7405521 was granted and assigned to Lam Research on July, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 22, 2003
Date of Patent
July 29, 2008
Patent Application Number
10645665
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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