Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Markus Winterhalter0
Peter Wiedemuth0
Stefan Schirmaier0
Date of Patent
August 5, 2008
0Patent Application Number
112264730
Date Filed
September 15, 2005
0Patent Citations Received
0
...
Patent Primary Examiner
Patent abstract
A method of generating an output DC voltage of a gas discharge process voltage supply unit, in which in a first voltage transformation stage a first DC voltage is transformed into a second DC voltage of a predetermined voltage range, and the output DC voltage is generated from the second DC voltage in a second voltage transformation stage. A switching element of at least one boost converter is switched with a controlled pulse-duty factor for generating the output DC voltage in the second voltage transformation stage. This method permits striking and maintenance of a plasma process.
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