Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
John D. Larson, III0
Date of Patent
August 5, 2008
0Patent Application Number
109773980
Date Filed
October 29, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The temperature-compensated film bulk acoustic resonator (FBAR) device comprises an FBAR stack. The FBAR stack comprises an FBAR and a temperature-compensating element. The FBAR is characterized by a resonant frequency having a temperature coefficient, and comprises opposed planar electrodes and a piezoelectric element between the electrodes. The piezoelectric element has a temperature coefficient on which the temperature coefficient of the resonant frequency depends at least in part. The temperature-compensating element has a temperature coefficient opposite in sign to the temperature coefficient of the piezoelectric element.
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